Lateral currents in contact strips taken into account. Four-terminal test structures added to intergrated circuits to enable measurement of interfacial resistivities of contacts between thin conducting layers. Thin-film model simplified quasi-two-dimensional potential model that accounts adequately for complicated three-dimensional, nonuniform current densitites. Effects of nonuniformity caused by lateral current flow in strips summarized in equivalent resistance Rs and voltage Vs.


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    Title :

    Formula Gives Better Contact-Resistance Values


    Contributors:

    Published in:

    Publication date :

    1988-07-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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