Improved micromachined tunneling accelerometer contains two deflecting transducer elements: One an elastically supported proof mass having relatively low resonant frequency; other cantilever tunneling transducer that tracks displacement of proof mass and has relatively high resonant frequency ({sup a} 10 kHz). Deflection voltage generated by circuit like described in "Wideband Feedback Circuit for Tunneling Sensor" (NPO-18866). Accelerometers of this type suited for underwater acoustic measurements, detecting vibrations associated with malfunctions in vehicles, detecting seismic signals, monitoring and controlling vibrations in structures, and other applications.


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    Title :

    Dual-Element Tunneling Accelerometer



    Published in:

    Publication date :

    1994-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English






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