Improved micromachined tunneling accelerometer contains two deflecting transducer elements: One an elastically supported proof mass having relatively low resonant frequency; other cantilever tunneling transducer that tracks displacement of proof mass and has relatively high resonant frequency ({sup a} 10 kHz). Deflection voltage generated by circuit like described in "Wideband Feedback Circuit for Tunneling Sensor" (NPO-18866). Accelerometers of this type suited for underwater acoustic measurements, detecting vibrations associated with malfunctions in vehicles, detecting seismic signals, monitoring and controlling vibrations in structures, and other applications.
Dual-Element Tunneling Accelerometer
NASA Tech Briefs ; 18 , 11
1994-11-01
Miscellaneous
No indication
English
Dual-Element Tunneling Accelerometer
Online Contents | 1994
Dual-Element Tunneling Accelerometer With Dual Feedback
Online Contents | 1997
Study on lateral dual-element electron tunneling accelerometer [5253-06]
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|Micromachined Tunneling Accelerometer
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NTRS | 1998
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