Fundamental understanding and implementation of Al-enhanced PECVD SiNx hydrogenation in silicon ribbons
Solar energy materials & solar cells ; 74 , 1 ; 117-126
2002
Article (Journal)
English
Passivation characteristics of SiNx/a-Si and SiNx/Si-rich-SiNx stacked layers on crystalline silicon
Online Contents | 2012
|NTRS | 1988
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