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    Title :

    Examination of Bulge Test for Determining Residual Stress, Young's Modulus, and Poisson's Ratio of 3C-SiC Thin Films



    Published in:

    Publication date :

    2003



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown



    Classification :

    BKL:    55.50 Luftfahrzeugtechnik / 55.60 Raumfahrttechnik / 51.40 Werkstoffe für bestimmte Anwendungsgebiete
    Local classification TIB:    770/7040



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