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    Title :

    Bulk and surface passivation of silicon solar cells accomplished by silicon nitride deposited on industrial scale by microwave PECVD



    Published in:

    Progress in photovoltaics ; 13 , 7 ; 551-570


    Publication date :

    2005



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    BKL:    53.36 Energiedirektumwandler, elektrische Energiespeicher