Fast deposition of microcrystalline Si films from SiH2Cl2 using a high-density microwave plasma source for Si thin-film solar cells
Solar energy materials & solar cells ; 94 , 3 ; 524-531
2010
Article (Journal)
English
Ultrafast deposition of microcrystalline silicon films using high-density microwave plasma
Online Contents | 2009
|Ultrafast deposition of microcrystalline silicon films using high-density microwave plasma
Online Contents | 2009
|Properties of amorphous silicon solar cells fabricated from SiH2Cl2
Online Contents | 2001
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