To meet Euro6 regulation particulate matter MEMS sensor is suggested. This sensor detects induced charges by PM. To increase sensitivity of the sensor, surface area of the sensor is increased by MEMS process. Sensor is made by low resistive silicon. Total size is 4.3 mm x 59.4 mm x 1 mm and size of sensor part is 4.3 mm x 13 mm. On the backside of the sensor, Pt heater is fabricated to remove piled PM on sensor part. After sensor part, charge amplifier is used to measure the induced charge of the sensor. From FFT of sensor signal, it can sense 5.46 mg/m₃ of PM. In this paper, MEMS devices for exhaust system monitoring of automobiles are investigated. PM emitted from diesel engine is charged particle. Charge-induced-type PM sensor we designed can measure by real time and it doesn't need particle collection apparatus
MEMS Sensor for Particulate Matter Measurement of Exhaust Gas
Sae Technical Papers
Asia Pacific Automotive Engineering Conference ; 2013
2013-03-25
Conference paper
English
MEMS Sensor for Particulate Matter Measurement of Exhaust Gas
British Library Conference Proceedings | 2013
|MEMS sensor for particulate measurement of exhaust gas
Automotive engineering | 2013
|Diesel exhaust particulate sampler for on-board particulate matter measurement
Automotive engineering | 2008
|Performance Characteristics of a New On-Board Engine Exhaust Particulate Matter Sensor
SAE Technical Papers | 2005
|Performance characteristics of a new in-board engine exhaust particulate matter sensor
Automotive engineering | 2005
|