This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.
Micromachined Accelerometers for Inertial Navigation Applications
Sae Technical Papers
SAE 2005 World Congress & Exhibition ; 2005
2005-04-11
Conference paper
English
Micromachined accelerometers for inertial navigation applications
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