This paper describes the fabrication and operation of a low-cost, monolithic silicon mass-air-flow sensor (MAFS) developed for automotive applications. The device is a hot wire anemometer made of two thin single-crystal silicon beams, one being the heated element and the other serving as a temperature reference. Temperature compensation techniques and the design tradeoffs to maximize performance while ensuring durability in the harsh automotive environment are discussed.


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    Title :

    A Micromachined Silicon Mass-Air-Flow Sensor


    Additional title:

    Sae Technical Papers


    Contributors:
    Stephan, C.H. (author) / Zanini, M. (author)

    Conference:

    International Congress & Exposition ; 1992



    Publication date :

    1992-02-01




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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