Abstract The capacitive angle sensor of the galvanometer scanner is designed. The task of developing a rotation angle sensor in the range of ±20 deg for scanning speeds of up to 20 kHz is being solved. The linear dependence of the change in capacitance on the angle in the considered range is achieved.
Angle Sensor for a High-Speed Galvo Scanner
Russian Aeronautics ; 61 , 3 ; 495-498
2018-07-01
4 pages
Article (Journal)
Electronic Resource
English
Angle Sensor for a High-Speed Galvo Scanner
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