This paper describes an absolute semiconductor pressure sensor suitable for the engine control systems in automobiles. Using the passive (electrically nonconnected) side of a sensor chip as the pressure interface, it has good pressure media compatibility. But it requires a pedestal with a pressure inlet hole and a larger contact area for good sealed, vacuum reference, since the larger contact area causes a larger temperature shift of the offset voltage due to thermal stress. We have analyzed the thermal stress by the finite element method and have designed a lower, tubular pedestal with a groove which has isolated the sensor chip from the thermal stress more effectively. As a result, the sensor chip has been assembled in a standard TO-5 package and a temperature shift of the offset voltage within plus/minus 1 % error of FS (Full Scale) without temperature compensation in the temperature range of -30 Cel to 100 Cel has been realized.


    Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    High reliability absolute semiconductor pressure sensors


    Additional title:

    Halbleiterdrucksensoren mit hoher Zuverlaessigkeit fuer Absolutmessungen


    Contributors:
    Bessho, M. (author) / Tsuru, Y. (author) / Horiike, H. (author)

    Published in:

    Publication date :

    1983


    Size :

    5 Seiten, 8 Bilder, 2 Tabellen, 2 Quellen



    Type of media :

    Report


    Type of material :

    Print


    Language :

    English




    High Reliability Absolute Semiconductor Pressure Sensor

    Horiike, H. / Yamagami, K. / Bessho, M. et al. | SAE Technical Papers | 1983


    High reliability absolute semiconductor pressure sensor

    Bessho,M. / Tsuru,Y. / Horiike,H. et al. | Automotive engineering | 1983


    Piezoresistive high-temperature absolute pressure sensors

    Bertola,A. / Fuerholz,A. / Stadler,J. et al. | Automotive engineering | 2009


    High reliability semiconductor pressure sensor for automobiles

    Inui,T. / Minorikawa,H. / Nishihara,M. et al. | Automotive engineering | 1982


    High Reliability Semiconductor Pressure Sensor for Automobiles

    Minorikawa, Hitoshi / Nishihara, Motohisa / Inui, Tomoji | SAE Technical Papers | 1982