This paper describes an absolute semiconductor pressure sensor suitable for the engine control systems in automobiles. Using the passive (electrically nonconnected) side of a sensor chip as the pressure interface, it has good pressure media compatibility. But it requires a pedestal with a pressure inlet hole and a larger contact area for good sealed, vacuum reference, since the larger contact area causes a larger temperature shift of the offset voltage due to thermal stress. We have analyzed the thermal stress by the finite element method and have designed a lower, tubular pedestal with a groove which has isolated the sensor chip from the thermal stress more effectively. As a result, the sensor chip has been assembled in a standard TO-5 package and a temperature shift of the offset voltage within plus/minus 1 % error of FS (Full Scale) without temperature compensation in the temperature range of -30 Cel to 100 Cel has been realized.
High reliability absolute semiconductor pressure sensors
Halbleiterdrucksensoren mit hoher Zuverlaessigkeit fuer Absolutmessungen
SAE-SP (Special Publications) ; 536 ; 55-59
1983
5 Seiten, 8 Bilder, 2 Tabellen, 2 Quellen
Report
English
High Reliability Absolute Semiconductor Pressure Sensor
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