A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS (Micro-Electro-Mechanical System) technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Microtechnology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micromachined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/- 3 mrad.


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    Title :

    Scanning micromechanical mirror for fine-pointing units of intersatellite optical links


    Additional title:

    Mikromechanischer Scanning-Spiegel für Feinlenkbaugruppen von Intersatellit-Optokopplern


    Contributors:
    Graeffe, J. (author) / Suhonen, M. (author) / Sipola, H. (author) / Sillanpää, T. (author) / Tuppurainen, J. (author)


    Publication date :

    2000


    Size :

    6 Seiten, 11 Bilder, 3 Tabellen, 5 Quellen


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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