In today's automotive applications, there are many sensors such as flow sensors, accelerometers, gas sensors, pressure sensors, and thermal sensors that are based on thin and thick film ceramic sensor technology. Various thin and thick film processing techniques are reviewed which can be important to the automotive ceramic sensor technology. Process issues which are unique to the thin and thick film ceramic sensors such as tape casting, screen printing, ohmic and non-ohmic electrode-ceramic-junction contacts are discussed. Several examples are given to demonstrate that the thin and thick film processing technology not only can produce economic ceramic sensors but also can improve and enhance the sensing performances.
Thin/thick film ceramic sensors
Keramiksensoren in Dünnschicht- und Dickschichttechnik
Sensors Expo, 1994 ; 419-427
1994
9 Seiten, 39 Quellen
Conference paper
English
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