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    Title :

    Capabilities of Low Power Excimer Lasers in Micromachining



    Conference:

    6th Annual meeting, LEOS '93 ; 1993 ; San Jose; CA


    Published in:

    LEOS '93 ; 762-763


    Publication date :

    1993-01-01


    Size :

    2 pages


    Remarks:

    IEEE cat no 93CH3297-9



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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    Andrellos, Jack C. / Scaggs, Michael J. / Sowada, Ulrich | SAE Technical Papers | 1989


    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    Micromachining by lasers

    Schmidt, H. | IEEE | 1994


    Excimer laser: a new tool for precision micromachining

    Endert, H. / Paetzel, R. / Basting, D. | British Library Online Contents | 1995