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    Title :

    Resonating large-angle and low-consumption micromachined optical scanner [3276-09]



    Conference:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Publication date :

    1998-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 3276

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