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    Title :

    Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications



    Conference:

    Conference, Advanced microsystems for automotive applications ; 1998



    Publication date :

    1998-01-01


    Size :

    10 pages


    Remarks:

    Published in 1998



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





    Silicon Micromachining Technology for Automotive Applications

    Lee,K.W. / Walker,B.E. / Allied Automotive,US et al. | Automotive engineering | 1986


    A precision yaw rate sensor in silicon micromachining

    Lutz,M. / Golderer,W. / Gerstenmeier,J. et al. | Automotive engineering | 1998



    A low cost angular rate sensor in si-surface micromachining technology for automotive application

    Thomae,A. / Schellin,R. / Lang,M. et al. | Automotive engineering | 1999