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    Title :

    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]



    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Quasi-confocal extended field surface sensing [4449-23]

    Cohen-Sabban, J. / Gaillard-Groleas, J. / Crepin, J.-P. et al. | British Library Conference Proceedings | 2001


    Nr. 4449

    DataCite | 1930


    Computerized Profilometer For Inspection Of Welds

    Badinger, M. A. / Stone, F. N. / Drouant, G. J. | NTRS | 1991


    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001


    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001