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    Title :

    Optimization of Diffraction Grating Profiles in Fabrication by the Electron-Beam Lithography



    Conference:

    Topical meeting; 6th, Diffractive optics and micro-optics ; 2002 ; Tucson, AZ



    Publication date :

    2002-01-01


    Size :

    3 pages


    Remarks:

    Also known as DOMO; Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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