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    Title :

    Characterization of a Microelectromechanical Systems (MEMS) Microphone



    Conference:

    Conference; 14th, Aeroacoustics ; 2008 ; Vancouver, Canada



    Publication date :

    2008-01-01


    Size :

    10 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Microelectromechanical Systems (MEMS)

    Ramesham, R. | NTRS | 1999


    Microelectromechanical systems (MEMS)

    Gabriel, K.J. | IEEE | 1997


    MicroElectroMechanical Systems (MEMS)

    Gabriel, K. J. / IEEE; Aerospace and Electronics Systems Society | British Library Conference Proceedings | 1997