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    Title :

    Micro- and nano-engineering for lithography


    Contributors:
    Hopper, C. (author)

    Published in:

    Publication date :

    1996-01-01


    Size :

    30 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    German


    Classification :

    DDC:    621.366



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