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    Title :

    Tapered microvalves fabricated by off-axis X-ray exposures


    Contributors:
    Tsuei, T. W. (author) / Wood, R. L. (author) / Khan Malek, C. (author) / Donnelly, M. M. (author) / Fair, R. B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 4 ; 201-204


    Publication date :

    1998-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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