This paper presents a piezoelectric microvalve technology with a high pressure handling capability for micropropulsion applications. The device is a normally closed valve fabricated mostly by the micromachining of silicon. The valve consists of a custom designed piezoelectric stack actuator bonded onto silicon valve components in a stainless steel housing. Major elements of the silicon valve design include narrow edge seating rings and tensile-stressed silicon tethers that contribute to the desired normally closed leak-tight operation. No leak has been detected from a soap solution test at differential pressures of 0-500 psi for a normally closed valve structure, indicating a leak rate of 0.001 sccm or lower has been achieved. Piezoelectric operation has been successfully demonstrated at a differential pressure of 500 psi. A flow rate of 20 seem at 100 psi has been obtained at 50 V.


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    Title :

    Piezoelectrically actuated microvalves for micropropulsion applications


    Contributors:


    Publication date :

    2002


    Size :

    5 Seiten, 25 Quellen



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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