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    Title :

    Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review


    Contributors:
    Rymuza, Z. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 5 , 4 ; 173-180


    Publication date :

    1999-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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