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    Title :

    On the Temperature Profile of the Thermally Excited Resonant Silicon Micro Structural Pressure Sensor


    Contributors:
    Fan, S.-c. (author) / Jia, Z.-h. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.13 / 619.40



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