Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation


    Contributors:
    Tang, Z. (author) / Fan, S. (author) / Xing, W. (author) / Guo, Z. (author) / Zhang, Z. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 9 ; 1481-1490


    Publication date :

    2011-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Easily manageable, electrothermally actuated silicon micro gripper

    Hoxhold, B. / Büttgenbach, S. | British Library Online Contents | 2010


    Hydrazine electrothermally augmented thruster /HEAT/

    FINSTON, R. / MEESE, R. | AIAA | 1979



    FEA modeling of a thermally excited silicon-beam resonant pressure sensor [4414-50]

    Chen, D. / Cui, D. / Wang, L. et al. | British Library Conference Proceedings | 2001


    Optimal design analysis of electrothermally driven microactuators

    Karbasi, S. M. / Shamshirsaz, M. / Naraghi, M. et al. | British Library Online Contents | 2010