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    Title :

    Reliability study of AlTi/TiW on polysilicon contacts for high temperature sensors


    Contributors:
    Andrei, A. (author) / Malhaire, C. (author) / Brida, S. (author) / Dujardin, J. M. (author) / Barbier, D. (author) / Legras, O. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 149-153


    Publication date :

    2005-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83