Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Integrated electromagnetic microactuators with a large driving force


    Contributors:
    Pan, C. T. (author) / Yang, H. (author) / Chou, M. C. (author) / Shen, S. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 173-179


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fabrication of functional components for electromagnetic microactuators

    Ruffert, C. / Feldmann, M. / Buettgenbach, S. et al. | British Library Online Contents | 2006


    Hard and soft magnetic materials for electromagnetic microactuators

    Bedenbecker, M. / Bandorf, R. / Bräuer, G. et al. | British Library Online Contents | 2008


    Surface Force in Electrostatic Type Microsensors and Microactuators

    Tsuchitani, S. / Suzuki, S. / Shimada, S. et al. | British Library Online Contents | 1994


    Shape memory microactuators

    Buttgenbach, S. / Butefisch, S. / Leester-Schadel, M. et al. | British Library Online Contents | 2001


    Progress in magnetic microactuators

    Guckel, H. | British Library Online Contents | 1998