Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication of functional components for electromagnetic microactuators


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 7 ; 670-675


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Integrated electromagnetic microactuators with a large driving force

    Pan, C. T. / Yang, H. / Chou, M. C. et al. | British Library Online Contents | 2005


    Hard and soft magnetic materials for electromagnetic microactuators

    Bedenbecker, M. / Bandorf, R. / Bräuer, G. et al. | British Library Online Contents | 2008


    Shape memory microactuators

    Buttgenbach, S. / Butefisch, S. / Leester-Schadel, M. et al. | British Library Online Contents | 2001


    Progress in magnetic microactuators

    Guckel, H. | British Library Online Contents | 1998


    Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators

    Hansal, W. E. / Steiner, H. / Mann, R. et al. | British Library Online Contents | 2014