Surface micromachined high-performance RF MEMS inductors
MICROSYSTEM TECHNOLOGIES ; 13 , 1 ; 79-83
2007-01-01
5 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Modeling, optimization and performance of high-Q MEMS solenoid inductors
British Library Online Contents | 2008
|CANEUS2006-11030 Novel Surface-Micromachined Micromirrors for Optical MEMS Beam Manipulators
British Library Conference Proceedings | 2006
|Variable MEMS-Based Inductors Fabricated from PECVD Silicon Nitride
British Library Conference Proceedings | 2002
|Distributed transmission line phase shifter using MEMS switches and inductors
British Library Online Contents | 2008
|