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    Title :

    Germanium resistors for RF MEMS based microsystems


    Contributors:
    Grenier, K. (author) / Bordas, C. (author) / Pinaud, S. (author) / Salvagnac, L. (author) / Dubuc, D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 601-606


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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