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    Title :

    Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices


    Contributors:
    Le, N. C. (author) / Dao, D. V. (author) / Yokokawa, R. (author) / Wells, J. C. (author) / Sugiyama, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 12 ; 1845-1853


    Publication date :

    2009-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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