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    Title :

    Fabrication of steel roller imprinting molds through adapting conventional planar micro fabrication tools


    Contributors:
    Huang, M. C. (author) / Fu, C. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 11 ; 1845-1853


    Publication date :

    2010-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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