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    Title :

    Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 12 ; 1815-1826


    Publication date :

    2009-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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