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    Title :

    A continuous-membrane micro deformable mirror based on anodic bonding of SOI to glass wafer


    Contributors:
    Qiao, D. Y. (author) / Wang, S. J. (author) / Yuan, W. Z. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 10 ; 1765-1769


    Publication date :

    2010-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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