Photolithography: Holography makes a bid in the search for maskless lithography
LASER FOCUS WORLD ; 46 , 8 ; 16-19
2010-01-01
4 pages
Article (Journal)
English
DDC: | 621.366 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
HOLOGRAPHY Submicron photolithography opens new areas of holographic design
British Library Online Contents | 2004
|A dual step precision multi-DOF stage for maskless digital lithography
British Library Online Contents | 2012
|DTuC2 Maskless nanolithography with diffractive optics: Zone-plate-array lithography (ZPAL)
British Library Conference Proceedings | 2000
|British Library Online Contents | 2014
|