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    Title :

    A dual step precision multi-DOF stage for maskless digital lithography


    Contributors:
    Ihn, Y. S. (author) / Ji, S. H. (author) / Moon, H. (author) / Choi, H. R. (author) / Koo, J. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 9/10 ; 1741-1750


    Publication date :

    2012-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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