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    Title :

    Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage


    Contributors:
    Rocha, L. A. (author) / Dias, R. A. (author) / Cretu, E. (author) / Mol, L. (author) / Wolffenbuttel, R. F. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 3 ; 429-436


    Publication date :

    2011-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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