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    Title :

    Polymeric (SU-8) optical microscanner driven by electrostatic actuation


    Contributors:
    Moon, S. H. (author) / Jun, M. H. (author) / An, J. Y. (author) / Lee, J. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 9 ; 1439-1445


    Publication date :

    2011-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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