A method to measure the micro-capacitance for MEMS comb actuators
MICROSYSTEM TECHNOLOGIES ; 17 , 12 ; 1771-1778
2011-01-01
8 pages
Article (Journal)
English
| DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
| British Library Online Contents | 2015
Piezoelectric micro-actuators for RF-MEMS switches
| IEEE | 2005
Micro robot system with moving micro-car driven by electrostatic comb-drive actuators
| British Library Online Contents | 2010
| British Library Online Contents | 2011
MEMS actuators and micropositioners for integrated micro-optics (Invited Paper) [3289-18]
| British Library Conference Proceedings | 1998