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    Title :

    A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane


    Contributors:
    Petricca, L. (author) / Grinde, C. (author) / Ohlckers, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 5 ; 613-622


    Publication date :

    2012-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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