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    Title :

    A patterning technique of lead zirconate titanate thin film by ultraviolet-light


    Contributors:
    Wu, C. C. (author) / Hsueh, C. H. (author) / Chang, Y. T. (author) / Chang, C. T. (author) / Chung, K. J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 6 ; 853-859


    Publication date :

    2013-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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