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    Title :

    Fabrication of micro pore optics with smooth sidewall using X-ray lithography


    Contributors:
    Zhang, T. (author) / Yi, F. (author) / Wang, B. (author) / Liu, J. (author) / Ashmkhan, M. (author) / Zhang, X. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2005-2010


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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