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    Title :

    Conductivity of high-temperature annealed silicon direct wafer bonds


    Contributors:
    Schjølberg-Henriksen, K. (author) / Tvedt, L. G. (author) / Gjelstad, S. A. (author) / Mørk, C. (author) / Moe, S. T. (author) / Imenes, K. (author) / Poppe, E. (author) / Wang, D. T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 5 ; 979-985


    Publication date :

    2015-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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