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    Title :

    Ellipsometric studies of the diffusion of automic oxygen through silicon dioxide thin films


    Author / Creator :

    MEYERS, GRANT G., WOOLLAM, JOHN, GULINO, DANIEL A., DE, BHOLA N., MEMARZADEH, KAZEM, JULIANTO, AGUS


    Contributors:

    Published in:

    AIAA JOURNAL ; 28 , 6 ; 1065-1066


    Publication date :

    1990




    Type of media :

    Article (Journal)


    Type of material :

    Electronic Resource


    Language :

    English



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