Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine
Die Integration eines AFM in eine Maschine fuer Nano-Messung und Nano-Positionierung.
2004
7 pages
VDI-Ber.; 2004;8th Int.Symposium on Measurement and Quality Control in Production;VDI-Berichte;Nr.;1860
Miscellaneous
English
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