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    Title :

    Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine


    Additional title:

    Die Integration eines AFM in eine Maschine fuer Nano-Messung und Nano-Positionierung.


    Contributors:

    Publication date :

    2004


    Size :

    7 pages


    Remarks:

    VDI-Ber.; 2004;8th Int.Symposium on Measurement and Quality Control in Production;VDI-Berichte;Nr.;1860


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English