The invention provides a wafer carrier transport vehicle, which comprises a transport basic frame, a plurality of vertical long rods and a plurality of vertical short rods, and is characterized in that the transport basic frame comprises a bottom frame, a fixed frame, a group of vertical long rods and a group of vertical short rods; the group of upright long rods and the group of upright short rods are respectively connected with corner nodes of the bottom frame and the fixed frame and are vertical to the bottom frame; the carrying platform comprises a bottom plate and a side plate, one side of the bottom plate is fixedly connected with the set of upright short rods of the carrying foundation frame, the other side of the bottom plate is fixedly connected with one side of the side plate, and the other side of the side plate is fixedly connected with the set of upright long rods of the carrying foundation frame; the bottom plate and the side plates are tightly attached to the bottom surface and the side surfaces of the wafer carrier respectively; according to the wafer carrier transport vehicle, the wafers can be prevented from being knocked off, broken and subjected to electrostatic dust collection in the transport process, and the wafer carrier transport vehicle is an efficient, safe and easy-to-operate wafer transport tool.

    本发明提供一种晶圆载具运输车,包括:运载基础框架,包括底部框架、固定框架、一组直立长杆和一组直立短杆,所述底部框架与所述固定框架平行,所述一组直立长杆和所述一组直立短杆分别与所述底部框架和所述固定框架的转角节点连接并且垂直于所述底部框架;运载台,包括底板和侧板,所述底板一边与所述运载基础框架的所述一组直立短杆固定连接,所述底板的另一边与所述侧板的一边固定连接,所述侧板的另一边与所述运载基础框架的所述一组直立长杆固定连接,所述底板和所述侧板分别与所述晶圆载具的底面和侧面紧密贴合;本发明的晶圆载具运输车能够防止晶圆在运输过程中撞落、破碎和静电吸尘,是一种高效安全、操作简单的晶圆运输工具。


    Access

    Download


    Export, share and cite



    Title :

    Wafer carrier transport vehicle


    Additional title:

    晶圆载具运输车


    Contributors:
    YANG RUIPENG (author) / BU LIFEI (author) / TIAN JINGYUE (author) / QILE MUGE (author)

    Publication date :

    2022-04-22


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS



    Silicon wafer transport device and silicon wafer transport vehicle

    HU YICHAO | European Patent Office | 2024

    Free access

    Silicon wafer transport vehicle

    SUN JINTAO | European Patent Office | 2024

    Free access

    Automatic wafer transport vehicle

    ZHANG ZHENYI / HONG CHENGDU | European Patent Office | 2023

    Free access

    Wafer carrier loader

    XU WEIFENG / HONG CHENGDU | European Patent Office | 2024

    Free access

    CARRIER TRANSPORT VEHICLE PERSONAL SENSOR ZONE

    MOTON JR ROBERT T / LUU ADRIANNE BINH / PRATT JAMES et al. | European Patent Office | 2022

    Free access