The invention discloses an automatic wafer transport vehicle, which relates to the technical field of wafer box carrying equipment, and comprises a vehicle main body provided with a loading station; the anti-falling frame comprises a first frame body and a second frame body which are vertically arranged on the object carrying station and are oppositely arranged, the first frame body and the second frame body define a stacking cavity used for stacking a column of wafer boxes in the circumferential direction, and the first frame body and the second frame body are arranged in a spaced mode to form a pair of clamping gaps which are located on the two sides of the stacking cavity and are oppositely arranged; the width of the clamping gap is smaller than the width of the wafer box located in the stacking cavity, so that the wafer box can be stacked in the stacking cavity and protected by the first frame body and the second frame body, the occupied area of the wafer box on the transport vehicle is reduced, and meanwhile the wafer box is prevented from falling off in the transport process.

    本发明公开了一种晶圆自动化运输车,涉及晶圆盒搬运设备技术领域,包括:车主体,其上设有一载物工位;防坠架,包括竖立设于载物工位上且相对设置的的第一架体和第二架体,第一架体和第二架体绕周向围设形成一用于码垛一列晶圆盒的码垛腔,第一架体和第二架体之间间隔设置形成分别位于码垛腔两侧且相对设置的一对夹取间隙,夹取间隙宽度小于位于码垛腔内的晶圆盒的宽度,使晶圆盒可被叠放在码垛腔内被第一架体和第二架体防护,降低晶圆盒在运输车上的占用面积,同时防止晶圆盒在运输过程中掉落。


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    Title :

    Automatic wafer transport vehicle


    Additional title:

    一种晶圆自动化运输车


    Contributors:
    ZHANG ZHENYI (author) / HONG CHENGDU (author)

    Publication date :

    2023-10-03


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B60P Fahrzeuge zum Transport von Lasten oder zum Befördern, Tragen oder Aufnehmen besonderer Lasten oder Gegenstände , VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS / G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES , Systeme zum Steuern oder Regeln nichtelektrischer veränderlicher Größen



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