The present application provides a tower elevator and a semiconductor transfer apparatus including the same, the tower elevator including: a frame extending in a vertical direction; a carriage configured to move along the frame; a first coil disposed on a first surface of the frame, the first surface facing the bracket; a second coil disposed on the first surface of the frame and separated from the first coil; a first magnet connected to the bracket and located between the first coil and the second coil; and a second magnet connected to the bracket, between the first magnet and the second coil, and separated from the first magnet.
本申请提供了一种塔式升降机和包括该塔式升降机的半导体传送设备,塔式升降机包括:框架,在竖直方向上延伸;托架,配置为沿着框架移动;第一线圈,布置在框架的第一表面上,第一表面面向托架;第二线圈,布置在框架的第一表面上,并且与第一线圈分离;第一磁体,连接到托架,并且位于第一线圈和第二线圈之间;以及第二磁体,连接到托架,位于第一磁体和第二线圈之间,并且与第一磁体分离。
Tower lift and semiconductor transfer apparatus including same
塔式升降机和包括该塔式升降机的半导体传送设备
2024-08-13
Patent
Electronic Resource
Chinese
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