A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.
Vibration device, electronic apparatus, and vehicle
2022-04-05
Patent
Electronic Resource
English
Vibration device, vibration module, electronic apparatus, and vehicle
European Patent Office | 2021
|VIBRATION DEVICE, VIBRATION MODULE, ELECTRONIC APPARATUS, AND VEHICLE
European Patent Office | 2020
|