A vibration device includes: a base substrate which is a first conductivity type semiconductor substrate; a lid substrate; a vibration element disposed between the base substrate and the lid substrate; a wiring disposed on a surface of the base substrate at the lid substrate side; and a coupling member that electrically couples the wiring and the vibration element to each other. The base substrate includes a second conductivity type well, which is different from the first conductivity type, and a first conductivity type first contact area that is disposed in the well and that has a first contact surface which is a part of the surface. The wiring and the coupling member are in contact with the first contact surface, and are electrically coupled to each other via the first contact area.


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    Title :

    VIBRATION DEVICE, ELECTRONIC APPARATUS AND VEHICLE


    Contributors:

    Publication date :

    2020-07-02


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR / G06F ELECTRIC DIGITAL DATA PROCESSING , Elektrische digitale Datenverarbeitung / G10K Tonerzeugungsvorrichtungen , SOUND-PRODUCING DEVICES



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